Micro-sized energy storage devices (MESDs) are power sources with small sizes, which generally have two different device architectures: (1) stacked architecture based on thin-film electrodes; (2) in-plane architecture based on micro-scale interdigitated electrodes .
The integration of TENG devices and MESDs could directly convert mechanical energy to electrical energy and then stored in MESDs , , . Wang et al. developed a self-charging system by integrating a TENG and MSC arrays on a single substrate through a laser engraving technique .
Micro-electrodes with thin thickness would reach to a high mass energy density of active materials, whereas lead to an unsatisfied energy density of the device level. 3D micro-electrodes could improve the energy density of MESDs, which is generally accompanied with the sacrifice of rate performance .
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